Effective dielectric permittivity of ferroelectric film included in parallel-plate and planar ferroelectric capacitors

The characteristics of parallel-plate and planar ferroelectric capacitors are investigated experimentally and theoreti-cally. The size effect in Ba0.3Sr0.7TiO3 included into parallel-plate and planar capacitors is studied.

Authors: S.P.Zubko, A.G.Gagarin, N.Yu.Medvedeva

Direction: Микро- и наноэлектроника

Keywords: Thin film, size effect, ferroelectrics, capacitor

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