The Crystal Structure and Properties of Barium Zirconate Titanate and Barium Stannate Titanate Thin Films for Microwave Applications

Structural and radio frequency (RF) dielectric properties of thin films of ferroelectric solid solutions BaZrxTi1-xO3 and BaSnxTi1-xO3 obtained by RF magnetron sputtering of ceramic targets on Pt/ r-cut of Al2O3 sapphire substrate are investi-gated. A high tunability of thin layers and low values of dielectric loss acceptable for microwave application have been revealed.

Authors: A.V.Tumarkin, S.V.Razumov, A.G.Gagarin, A.M.Cherniavsky, N.А.Yalymov, M.V.Zlygostov, A.A.Poteshkina, J.A.Uvarenkova, V.I.Ivanova

Direction: Электроника СВЧ

Keywords: Radio Frequency Magnetron Sputtering, Thin Films, Barium Strontium Titanate, Barium Zirconate Titanate, Barium Stannate Titanate, X-ray Diffraction

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